Browsing Centre for Nano Science and Engineering (CeNSE) by Subject "PECVD silicon carbide and silicon nitride"
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Exploring One-dimensional Micromechanical Resonators with Residual Stresses for Potential Sensing Applications and Measurement of Mechanical Properties
Recently the domain of microelectromechanical systems (MEMS) has seen an unprecedented rise in use of varieties of new materials other than the conventional silicon and related materials originally borrowed from semiconductor ...