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Effect Of Squeeze Film Flow On Dynamic Response Of MEMS Structures With Restrictive Flow Boundary Conditions
(2011-07-08)
There are many ways in which the surrounding media, such as air between an oscillating MEMS structure and a fixed substrate, can affect the dynamic response of a MEMS transducer. Some of these effects involve dissipation ...
Study Of Squeeze Film Effects In Modelling Dynamic MEMS Devices
(2011-02-21)
We present studies on squeeze film effects in dynamic MEMS devices with a special emphasis on the development of compact analytical models.
First, the efficacy of lumped parameter modelling of dynamic MEMS devices is ...