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Analysis Of Squeeze Film Damping In Microdevices
There are various energy dissipation mechanisms that affect the dynamic response of microstructures used in MEMS devices. A cumulative effect of such losses is captured by an important characteristic of the structure called ...
Analytical, Numerical, And Experimental Studies Of Fluid Damping In MEMS Devices
Fluid damping arising from squeeze ﬁlm ﬂow of air or some inert gas trapped between an oscillating micro mechanical structure, such as a beam or a plate, and a ﬁxed substrate often dominates the other energy dissipation ...