Browsing Mechanical Engineering (ME) by Subject "Microelectromechanical Systems"
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Design And Analysis Of MEMS Angular Rate Sensors
(Indian Institute of Science, 2007-06-18)Design and analysis of polysilicon and single crystal silicon gyroscopes have been carried out. Variations in suspension design have been explored. Designs that utilize in-plane and out-of-plane sensing are studied. Damping ... -
Effect Of Squeeze Film Flow On Dynamic Response Of MEMS Structures With Restrictive Flow Boundary Conditions
(2011-07-08)There are many ways in which the surrounding media, such as air between an oscillating MEMS structure and a fixed substrate, can affect the dynamic response of a MEMS transducer. Some of these effects involve dissipation ...