Browsing Mechanical Engineering (ME) by Subject "Microelectromechanical Devices"
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Analytical, Numerical, And Experimental Studies Of Fluid Damping In MEMS Devices
(2009-09-11)Fluid damping arising from squeeze film flow of air or some inert gas trapped between an oscillating micro mechanical structure, such as a beam or a plate, and a fixed substrate often dominates the other energy dissipation ... -
Study Of Squeeze Film Effects In Modelling Dynamic MEMS Devices
(2011-02-21)We present studies on squeeze film effects in dynamic MEMS devices with a special emphasis on the development of compact analytical models. First, the efficacy of lumped parameter modelling of dynamic MEMS devices is ...