Browsing Mechanical Engineering (ME) by Subject "Micro Electromechanical Systems"
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A Study of Mode Dependent Energy Dissipation in 2D MEMS Resonators
(2018-02-25)With the advent of micro and nano electromechanical systems (MEMS/NEMS), there has been rapid development in the design and fabrication of sensitive resonant sensors. Sensitivity of such devices depends on the resonant ...