Browsing Mechanical Engineering (ME) by Subject "MEMS Devices - Fluid Damping"
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Effect Of Squeeze Film Flow On Dynamic Response Of MEMS Structures With Restrictive Flow Boundary Conditions
(2011-07-08)There are many ways in which the surrounding media, such as air between an oscillating MEMS structure and a fixed substrate, can affect the dynamic response of a MEMS transducer. Some of these effects involve dissipation ...