Browsing Mechanical Engineering (ME) by Subject "MEMS Device"
Now showing items 1-3 of 3
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Analysis Of Squeeze Film Damping In Microdevices
(2012-12-12)There are various energy dissipation mechanisms that affect the dynamic response of microstructures used in MEMS devices. A cumulative effect of such losses is captured by an important characteristic of the structure called ... -
Effect Of Squeeze Film Flow On Dynamic Response Of MEMS Structures With Restrictive Flow Boundary Conditions
(2011-07-08)There are many ways in which the surrounding media, such as air between an oscillating MEMS structure and a fixed substrate, can affect the dynamic response of a MEMS transducer. Some of these effects involve dissipation ... -
Study Of Squeeze Film Effects In Modelling Dynamic MEMS Devices
(2011-02-21)We present studies on squeeze film effects in dynamic MEMS devices with a special emphasis on the development of compact analytical models. First, the efficacy of lumped parameter modelling of dynamic MEMS devices is ...