Browsing Mechanical Engineering (ME) by Author "Shishir Kumar, *"
Now showing items 1-1 of 1
-
Effect Of Squeeze Film Flow On Dynamic Response Of MEMS Structures With Restrictive Flow Boundary Conditions
Shishir Kumar, * (2011-07-08)There are many ways in which the surrounding media, such as air between an oscillating MEMS structure and a fixed substrate, can affect the dynamic response of a MEMS transducer. Some of these effects involve dissipation ...