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    Exploring One-dimensional Micromechanical Resonators with Residual Stresses for Potential Sensing Applications and Measurement of Mechanical Properties 

    Behera, Amruta Ranjan
    Recently the domain of microelectromechanical systems (MEMS) has seen an unprecedented rise in use of varieties of new materials other than the conventional silicon and related materials originally borrowed from semiconductor ...

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    Author
    Behera, Amruta Ranjan (1)
    SubjectBuckled beams (1)Cantilevers (1)Excitation of even modes (1)PECVD silicon carbide and silicon nitride (1)Residual stress (1)Sensing with buckled fixed-fixed micro-beams (1)
    TECHNOLOGY (1)
    Young's modulus (1)... View MoreHas File(s)Yes (1)

    etd@IISc is a joint service of SERC & J R D Tata Memorial (JRDTML) Library || Powered by DSpace software || DuraSpace
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