Browsing Division of Interdisciplinary Research by Author "Tiwari, Sudhanshu"
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Development of PZT Based PiezoMEMS for Fluid Property Sensing
Tiwari, SudhanshuThe research on Microelectromechanical Systems (MEMS) has resulted in several practical applications which have revolutionised the fi eld of sensors and actuators. Piezoresistive pressure sensors, capacitive micro-mirror ...