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    Development And Synthesis Of Metalorganic Complexes Of Zr, Hf, And Cr For Application To The CVD And Sol-Gel Synthesis Of Oxide Thin Films 

    Dharmaprakash, M S (2011-07-05)

    Thin Films From Metalorganic Precursors : ALD Of VO2 And CVD Of (Al1-xGax)2O3 

    Dagur, Pritesh (2010-04-08)
    Thin films and coatings of oxides are used in various fields of science and technology, such as semiconductor and optoelectronic devices, gas sensors, protective and wear resistant coatings etc. Of late, there has been a ...

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    AuthorDagur, Pritesh (1)Dharmaprakash, M S (1)Subject
    Chemical Vapour Deposition (CVD) (2)
    Electronic Engineering (2)
    Aluminium Gallium Oxide (1)Atomic Layer Deposition (ALD) (1)HfO2 Thin Films (1)Metalorganic Complexes (1)Metalorganic Precursors (1)MOCVD (1)Organometallic Complexes (1)Thin Film Deposition (1)... View MoreDate Issued2010 (1)2011 (1)Has File(s)Yes (2)

    etd@IISc is a joint service of SERC & J R D Tata Memorial (JRDTML) Library || Powered by DSpace software || DuraSpace
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