Browsing Instrumentation and Applied Physics (IAP) by Subject "Radio Frequency Sputtering"
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Sputter Deposited Thin Film Cathodes from Powder Target for Micro Battery Applications
(2018-07-16)All solid state Li-ion batteries (thin film micro batteries) have become inevitable for miniaturized devices and sensors as power sources. Fabrication of electrode materials for batteries in thin film form has been carried ...