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    • Browsing Division of Physical and Mathematical Sciences by Subject
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    Browsing Division of Physical and Mathematical Sciences by Subject "Langmuir Probe"

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      • ECR Assisted Deposition of Tin And Si3N4 Thin Films For Microelectronic Applications 

        Vargheese, K Deenamma (Indian Institute of Science, 2006-02-27)
        The broad theme of the present research investigation is Ion Assisted Deposition of thin films and its effect on the properties of thin films. Though this activity has been of interest to researchers for more than a decade, ...

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