Browsing Electrical Communication Engineering (ECE) by Subject "Capacitive Sensors"
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Exploration of Displacement Detection Mechanisms in MEMS Sensors
(2017-11-14)MEMS Sensors are widely used for sensing inertial displacements. The displacements arising out of acceleration /Coriolis effect are typically in the range of 1 nm-1 m. This work investigates the realization of high resolution ...