Browsing Division of Electrical, Electronics, and Computer Science (EECS) by Subject "Zirconium Oxide (ZrO2)"

Now showing items 1-1 of 1

    • High-k Dielectrics For Metal-Insulator-Metal Capacitors 

      Revathy, P (2016-11-23)
      Metal-insulator-metal (MIM) capacitors are used for analog, RF, and DRAM applications in ICs. The International Technology Roadmap for Semiconductors (ITRS) specifies continuing increase in capacitance density (> 7 fF/ ...