Browsing Division of Electrical, Electronics, and Computer Science (EECS) by Subject "MEMS"
Now showing items 1-3 of 3
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Design, Development, And Integration Of A Meso-scale Eletrostatic Phase Shifter On Microwave Laminate
(2014-08-05)Recent developments in the area of microfabrication technologies, has enabled the fabrication of many radio frequency/microwave components with better performance and lower cost than possible with semiconductor based ... -
Integrated Optical Double Ring Resonators with MEMS for Pressure and Acceleration Sensing
Silicon Photonics has become a signi ficant area of research in last three decades because of its high speed operation, low power consumption and the most important feature, resistant to electro-magnetic interferences. ... -
Towards a Unified Framework for Design of MEMS based VLSI Systems
(2018-02-12)Current day VLSI systems have started seeing increasing percentages of multiple energy domain components being integrated into the mainstream. Energy domains such as mechanical, optical, fluidic etc. have become all pervasive ...