Browsing Division of Electrical, Electronics, and Computer Science (EECS) by Advisor "Ananthasuresh, G K"
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Design, Fabrication and Characterization of Low Voltage Capacitive RF MEMS Switches
(2018-08-11)This dissertation presents the design, fabrication, and characterization of low-voltage capacitive RF MEMS switches. Although, RF MEMS switches have shown superior performance as compared to the existing solid-state ... -
Development Of Micromachined And Meso-Scale Multi-Axis Accelerometers With Displacement-Amplifying Compliant Mechanisms
(2017-02-22)Simultaneously achieving high-sensitivity and a large resonance frequency of micromachined accelerometers is difficult because of the inherent trade-off between the two. In this thesis, we present a mechanical displaceme ...