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Composition Analysis Of NiTi Thin Films Sputtered From A Mosaic Target : Synthesis And Simulation

dc.contributor.advisorMohan, S
dc.contributor.authorVincent, Abhilash
dc.date.accessioned2011-10-04T10:08:31Z
dc.date.accessioned2018-07-31T06:04:13Z
dc.date.available2011-10-04T10:08:31Z
dc.date.available2018-07-31T06:04:13Z
dc.date.issued2011-10-04
dc.date.submitted2005
dc.identifier.urihttps://etd.iisc.ac.in/handle/2005/1461
dc.identifier.abstracthttp://etd.iisc.ac.in/static/etd/abstracts/1880/G19584-Abs.pdfen_US
dc.language.isoen_USen_US
dc.relation.ispartofseriesG19584en_US
dc.subjectNickel Titanium Thin Films - Simulationen_US
dc.subjectMicroelectromechanical Systemsen_US
dc.subjectSimulation Techniquesen_US
dc.subjectSputter Depositionen_US
dc.subjectThin Films - Depositionen_US
dc.subjectNickel Titanium Shape Memory Alloysen_US
dc.subjectMosaic Target Sputteringen_US
dc.subjectShape Memory Alloys (SMAs)en_US
dc.subjectThin-film Shape Memory Alloysen_US
dc.subjectNiTi Thin Filmsen_US
dc.subject.classificationInstrumentationen_US
dc.titleComposition Analysis Of NiTi Thin Films Sputtered From A Mosaic Target : Synthesis And Simulationen_US
dc.typeThesisen_US
dc.degree.nameMSc Enggen_US
dc.degree.levelMastersen_US
dc.degree.disciplineFaculty of Engineeringen_US


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