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Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors

dc.contributor.advisorSrinivas, T
dc.contributor.authorPattnaik, Prasant Kumar
dc.date.accessioned2011-09-09T05:45:03Z
dc.date.accessioned2018-07-31T04:51:10Z
dc.date.available2011-09-09T05:45:03Z
dc.date.available2018-07-31T04:51:10Z
dc.date.issued2011-09-09
dc.date.submitted2005
dc.identifier.urihttps://etd.iisc.ac.in/handle/2005/1414
dc.identifier.abstracthttp://etd.iisc.ac.in/static/etd/abstracts/1823/G19131-Abs.pdfen_US
dc.language.isoen_USen_US
dc.relation.ispartofseriesG19131en_US
dc.subjectOptoelectromechanical Systemsen_US
dc.subjectPressure Detectorsen_US
dc.subjectVibration Detectorsen_US
dc.subjectMicro Optoelectromechanical Devicesen_US
dc.subjectMicro Electromechanical Sensorsen_US
dc.subjectIntegrated Opticsen_US
dc.subjectMicro-Opto-Electro-Mechanical Systems (MOEMS)en_US
dc.subjectMEMS Devicesen_US
dc.subjectMOEM Pressure Sensoren_US
dc.subjectMOEM Vibration Sensoren_US
dc.subjectMEMS Pressure Sensoren_US
dc.subjectMOEM Sensorsen_US
dc.subject.classificationElectromechanical Engineeringen_US
dc.titleAnalysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensorsen_US
dc.typeThesisen_US
dc.degree.namePhDen_US
dc.degree.levelDoctoralen_US
dc.degree.disciplineFaculty of Engineeringen_US


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