Browsing by Author "Khan, Sambuddha"
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Development Of Micromachined And Meso-Scale Multi-Axis Accelerometers With Displacement-Amplifying Compliant Mechanisms
Khan, Sambuddha (2017-02-22)Simultaneously achieving high-sensitivity and a large resonance frequency of micromachined accelerometers is difficult because of the inherent trade-off between the two. In this thesis, we present a mechanical displaceme ...