Browsing Instrumentation and Applied Physics (IAP) by Author "Mrinalini, R Sri Muthu"
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A Probing System with Replaceable Tips for Three Dimensional Nano-Metrology
Mrinalini, R Sri Muthu (2018-06-14)With increase in the number of three dimensional (3-D) nanometer-scale objects that are being either fabricated or studied, there is a need to accurately characterize their geometry. While the Atomic force microscope (AFM) ...