| dc.description.abstract | Compliant suspensions are often used in micromechanical devices and precision mechanisms as substitutes for kinematic joints. While their small-displacement behavior is easily captured in simple formulae, large-displacement behavior requires nonlinear finite element analysis. In this work, we present a method that helps capture the geometrically nonlinear behavior of compliant suspensions using parameterized non-dimensional maps. The maps are created by performing one nonlinear finite element analysis for any one loading condition for one instance of a suspension of a given topology and fixed proportions. These maps help retrieve behavioral information for any other instance of the same suspension with changed size, cross-section dimensions, material, and loading. Such quantities as multi-axial stiffness, maximum stress, natural frequency, etc. ,can be quickly and accurately estimated from the maps. These quantities are non-dimensionalized using suitable factors that include loading, size, cross-section, and material properties. The maps are useful in not only understanding the limits of performance of the topology of a given suspension with fixed proportions but also in design. We have created the maps for 20 different suspensions. Case studies are included to illustrate the effectiveness of the method in microsystem design as well as in precision mechanisms. In particular, the method and 2D plots of non-dimensional kinetoelastic maps provide a comprehensive view of sensitivity, cross-axis sensitivity, linearity, maximum stress, and bandwidth for microsensors and microactuators. | en_US |
