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Development And Synthesis Of Metalorganic Complexes Of Zr, Hf, And Cr For Application To The CVD And Sol-Gel Synthesis Of Oxide Thin Films

dc.contributor.advisorShivashankar, S A
dc.contributor.authorDharmaprakash, M S
dc.date.accessioned2011-07-05T09:03:15Z
dc.date.accessioned2018-07-30T15:08:40Z
dc.date.available2011-07-05T09:03:15Z
dc.date.available2018-07-30T15:08:40Z
dc.date.issued2011-07-05
dc.date.submitted2004
dc.identifier.urihttps://etd.iisc.ac.in/handle/2005/1261
dc.identifier.abstracthttp://etd.iisc.ac.in/static/etd/abstracts/1642/G18604-Abs.pdfen_US
dc.language.isoen_USen_US
dc.relation.ispartofseriesG18604en_US
dc.subjectThin Film Devicesen_US
dc.subjectChemical Vapour Deposition (CVD)en_US
dc.subjectOrganometallic Complexesen_US
dc.subjectMetalorganic Complexesen_US
dc.subjectZirconia Thin Filmsen_US
dc.subjectHfO2 Thin Filmsen_US
dc.subjectMOCVDen_US
dc.subjectZrO2 Thin Filmsen_US
dc.subjectVO2 Thin Filmsen_US
dc.subject.classificationElectronic Engineeringen_US
dc.titleDevelopment And Synthesis Of Metalorganic Complexes Of Zr, Hf, And Cr For Application To The CVD And Sol-Gel Synthesis Of Oxide Thin Filmsen_US
dc.typeThesisen_US
dc.degree.namePhDen_US
dc.degree.levelDoctoralen_US
dc.degree.disciplineFaculty of Scienceen_US


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