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Thin Film Semiconducting Metal Oxides By Nebulized Spray Pyrolysis And MOCVD, For Gas-Sensing Applications
The atmosphere we live in contains various kinds of chemical species, natural and artificial, some of which are vital to our life, while many others are more or less harmful. The vital gases like oxygen, humidity have to ...
Studies On CVD And ALD Of Thin Films Of Substituted And Composite Metal Oxides, Including Potential High-k Dielectrics
The work carried out as a part of this thesis has been focussed on understanding different aspects of the chemical vapor deposition process namely, ALD / MOCVD. A large part of the thesis is aimed at solving the problem ...